| Rework the CVD boat reactor examples (a) CD12-2 and / or (b) CD12-3 taking into account the equilibrium reaction | ||
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| occurring throughout. Note that we no longer have equimolar counterdiffusion! A mixture of 60% SiH 4 and 40% inert carrier enters at 1000 K. All other parameter values are the same as in Problem CDP12-D. |
[2nd Ed. P11-22]