OLED Fabrication
(above)OLED growth system viewed from lab entrance. The vacuum thermal evaporation system in the center of the photo is used to deposit metal films. It is connected to chambers for the deposition of organic material and Indium Tin Oxide (ITO) through a high vacuum transfer tube behind the chamber. A nitrogen glovebox connected to the system can be seen on the left.
(above) High vacuum transfer tube for the OLED growth system. Samples can be transferred between metal, organic, and oxide chambers without breaking vacuum.
(above) 10 Source vacuum thermal evaporation system for deposition of organic materials. Organic materals can be deposited in neat films or mixed in user defined ratios.
(above) A sputter deposition system on the OLED tool cluster. It is normally used to grow Indium Tin Oxide (ITO). ITO forms a transparent conducting film that is widely used in flat panel display applications.
(above) Nitrogen glovebox connected to the OLED system tranfer tube though a load lock. Samples can be unpackaged, masked, and encapsulated in an oxygen and moisture free environment.
