OLED Fabrication

(above) An advanced organic vapor phase deposition (OVPD) system was fabricated for OCM by Angstrom Engineering. OVPD is a gas phase organic thin film deposition technique for OLEDs and organic PV cells developed by OCM. This largely automated system makes the OVPD technique more accessable to new experimenters and provides valuable data to scale OVPD for mass fabrication of organic devices. This system is connected to sputtering and vacuum thermal evaporation chambers by a vacuum transfer tube. Complete devices can be grown without exposure to air.

(above) OLED growth system viewed from lab entrance. The vacuum thermal evaporation system in the center of the photo is used to deposit metal films. It is connected to chambers for the deposition of organic material and Indium Tin Oxide (ITO) through a high vacuum transfer tube behind the chamber. A nitrogen glovebox connected to the system can be seen on the left.

(above) High vacuum transfer tube for the OLED growth system. Samples can be transferred between metal, organic, and oxide chambers without breaking vacuum.

(above) 10 Source vacuum thermal evaporation system for deposition of organic materials. Organic materals can be deposited in neat films or mixed in user defined ratios.

(above) A sputter deposition system on the OLED tool cluster. It is normally used to grow Indium Tin Oxide (ITO). ITO forms a transparent conducting film that is widely used in flat panel display applications.

(above) Nitrogen glovebox connected to the OLED system tranfer tube though a load lock. Samples can be unpackaged, masked, and encapsulated in an oxygen and moisture free environment.